THE PREPARATION OF Al-DOPED ZnO THIN FILMS BY SPRAY PYROLYSIS TECHNIQUE FOR ALCOHOL VAPOR SENSOR
DOI:
https://doi.org/10.18173/2354-1059.2024-0032Keywords:
Al-doped ZnO, alcohol vapor sesor, spray pyrolysisAbstract
Thin films of ZnO and Al-doped ZnO are deposited on glass wafer substrates using a compressed sprayer system with Zn(CH3COO)2.2H2O and AlCl3 as precursors. The influence of Al doping concentration on the crystal phase and morphology of the samples is investigated by XRD and SEM, respectively. The results show that the films have been crystallized in the form of the wurtzite hexagonal phase of the ZnO lattice, and the addition of Al does not change the ZnO crystal structure. Despite this, SEM images show that added Al significantly affects the particle size of the samples. The particle size decreases and becomes more uniform as the Al concentration increases up to 7%. Further increasing the Al concentration causes the particles to agglomerate into clusters. The resistance measurements show that the sheet resistance of the films decreases in the presence of the Al dopant, providing evidence that Al has been successfully doped into the ZnO crystal lattice. An appropriate amount of Al dopant can improve the alcohol vapor sensitivity of the film. The ZnO film doped with 7% Al exhibits the best alcohol sensitivity.
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